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            Bilz Vibration Technology, Inc.

Telephone (330) 468-BILZ (2459) 

P.O. Box 241305
Fax (216) 274-9198 Cleveland, OH, USA 44124
After hours: 440-478-3456  E-mail: info@bilz-usa.com


Vibration Isolation Pad Materials

Leveling Feet / Elements

Precision Leveling Wedges

FAEBI Rubber Air Springs 5 Hz

BiAir Membrane Air Springs 1.5 Hz

Active Isolation Systems-AIS�


Isolated Tables/Platforms

Isolation Systems for Test Stands

Isolated Machine Foundations

Vibration Measurement


AIS� - Active Isolation System catalog pages 34-39



Brochure for SemiconWest



Brochure for Semiconductor, Flat Panel Display, Photovoltaic markets 




Wafer Inspection

     Applied Material: CompassPro 

         Wafer Inspection machine


Active Isolation System AIS�

  • Active vibration isolation system providing control by means of electro-pneumatic in either 3 or 6 Degrees Of Freedom. 

  • Optimal active vibration isolation performance without any amplification at resonance.

  • Excellent level accuracy (+ 10 microns) in both the vertical and horizontal plane.

  • Minimal deflection and settling time after an acceleration or deceleration of a moving  mass within the machine, shorter settling times equals greater machine throughput.

  • Very efficient real time control.

  • PLC, CAN-Bus, one Controller and one High Speed electro-pneumatic servo valve for each degree of freedom. 

  • Each Controller consists of a microprocessor and integrated, high resolution sensors for position, air pressure and acceleration.

  • Easy-to-use, intelligent WinSNI-Software for setting up and optimizing the Active vibration isolation system AIS� and for providing system diagnostics. 

  • Two different modes of operation can be selected by simply using a digital I/O.  Scanning mode (during sensitive machine operations) and loading mode (during moving mass within the machine).

  • Feedforward signal is not required from the machine controller simplifying setup.

  • No disturbing heat generation, magnetic variations or high electrical power consumption as by electromagnetic actuators and linear motors.

Range of Application

Optimal active vibration isolation performance for machines with high dynamic forces that are performing sensitive measurements and inspections, lithography equipment, laser machines, high resolution electron microscopes, interferometer, and machinery for the semiconductor industry. 


The Active vibration isolation system AIS� is utilized when the efficiency of isolation and the settling time of conventional air spring with electro-pneumatic leveling systems is insufficient. 



Active Vibration Isolation System AIS� has two primary functions:

One function is to protect the precision machine from floor vibration. The other primary function is to improve the performance of the machine by minimizing structure borne vibration created by the high dynamic forces produced during an acceleration or deceleration of a moving mass within the machine. In addition, settling time is reduced which minimizes the delay time before the machine can start performing its sensitive operation.


Bilz Active Vibration Isoaltion Test Stand Active Vibration Isolation System

             Bilz Test Stand                                     AIS� Controller


STEM TEM Microscope

             Electron Microscope retrofit

Active Isolation System

Lab table with Active Isolation System





�2009 Bilz Vibration Technology