Applied Material: CompassPro
Wafer Inspection machine
Isolation System AIS�
vibration isolation system providing control by means of
either 3 or 6 Degrees Of Freedom.
active vibration isolation performance without any amplification at
level accuracy (+ 10 microns) in both the vertical and horizontal
deflection and settling time after an acceleration or deceleration of
a moving mass within the machine,
shorter settling times equals greater machine throughput.
efficient real time control.
CAN-Bus, one Controller and one High Speed electro-pneumatic servo
valve for each degree of freedom.
Controller consists of a microprocessor and integrated, high
resolution sensors for position, air
pressure and acceleration.
intelligent WinSNI-Software for setting up and optimizing the
Active vibration isolation system
and for providing system diagnostics.
different modes of operation can be selected by simply using a digital
I/O. Scanning mode (during
sensitive machine operations) and loading mode (during moving mass
within the machine).
signal is not required from the machine controller simplifying setup.
disturbing heat generation, magnetic variations or high electrical
power consumption as by electromagnetic actuators and linear motors.
active vibration isolation performance for machines with high dynamic forces
that are performing sensitive measurements and
inspections, lithography equipment, laser
machines, high resolution electron
and machinery for the
The Active vibration isolation system
AIS� is utilized when the efficiency of isolation and the settling
time of conventional air spring with
electro-pneumatic leveling systems is insufficient.
Vibration Isolation System AIS�
has two primary functions:
function is to protect the precision machine from floor vibration. The
other primary function is to improve the
performance of the machine by minimizing structure
borne vibration created by the high dynamic forces produced during an
acceleration or deceleration of a moving mass within
the machine. In addition, settling time is
reduced which minimizes the delay time before the machine can start
performing its sensitive operation.
Test Stand AIS� Controller